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Studies on Correlation Between Diluted NH4OH Concentration of Pre GOX Clean SC1 and GOX Breakdown Induced by Silicon Surface Oxides

Wan Tatt Wai and Vanita Manaogaran and Lee Wei Cheat and Cheng Weei Kai and Ishak Asmahan and Liew Sun Khang

  • EDS
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    Length: 01:56:49

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