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Energy Harvesting in the Back End of Line with CMOS Compatible Ferroelectric Hafnium Oxide

C. Mart, S. Abdulazhanov, M. Czernohorsky, T. Kampfe, D. Lehninger, K. Falidas, S. Esslinger, K. Kuhnel, S. Oehler, M. Rudolph, M. Wiatr, S. Kolodinski, R. Seidel, W. Weinreich, L. M. Eng

DOI
10.17023/r3wf-a929
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