Defect Reduction in UV Nanoimprint Lithography Toshiki Ito DOI 10.17023/wz1g-sj51 EDS Members: Free IEEE Members: $15.00 Non-members: $20.00 Length: 00:53:39 26 Oct 2023 Tags: IEEE eds video Defect Reduction UV Nanoimprint lithography Toshiki Ito