plasma induced

Showing 1 - 1 of 1 resources. Too many results? Use the search filters to refine your search.

Sort by

Characterization Scheme for Plasma Induced Defect Creation Due to Stochastic Lateral Straggling in Si Substrates for Ultra Low Leakage Devices

15 Dec 2020

Characterization Scheme for Plasma Induced Defect Creation Due to Stochastic Lateral Straggling in Si Substrates for Ultra Low Leakage Devices

EDS

Members: $5.00
IEEE Members: $10.00
Non-members: $20.00