Skip to main content

sio2

Atomic Hydrogen Exposure to Enable High Quality Low Temperature SiO2 with Excellent pMOS NBTI Reliability Compatible with 3D Sequential Tier Stacking
15 Dec 2020

Atomic Hydrogen Exposure to Enable High Quality Low Temperature SiO2 with Excellent pMOS NBTI Reliability Compatible with 3D Sequential Tier Stacking

  • EDS
    Members: $5.00
    IEEE Members: $10.00
    Non-members: $20.00
Subscribe to sio2