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3D Integration of Vertical Stacking of MoS2 and Si CMOS Featuring Embedded 2T1R Configuration Demonstrated on Full Wafers

Chun Jung Su, M.K. Huang, K.S. Lee, V.P.H. Hu, Y.F. Huang, B.C. Zheng, C.H. Yao, N.C. Lin, K.H. Kao, T.C. Hong, P.J. Sung, C.T. Wu, T.Y. Yu, K.L. Lin, Y.C. Tseng, C.L. Lin, Y.J. Lee, T.S. Chao, J.Y. Li, W.F. Wu, J. M. Shieh, Y.H. Wang, W.K. Yeh

DOI
10.17023/savm-pp85
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    Length: 00:18:33

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